Silicon carbide ceramics are widely used in the semiconductor industry, mainly due to their excellent physical and chemical properties such as high hardness, high thermal conductivity, and low thermal expansion coefficient. The following is a detailed analysis of the application of silicon carbide ceramics in the semiconductor industry:
Silicon carbide ceramic parts produced by Mingrui Ceramics
1. Silicon carbide ceramics are used in key equipment for semiconductor integrated circuit manufacturing
Grinding discs: Traditional materials such as cast iron or carbon steel are prone to wear and have a large thermal expansion coefficient when grinding silicon wafers, which affects the processing quality.
SiC ceramic grinding discs are suitable for high-speed grinding and polishing due to their high hardness, low wear, and thermal expansion coefficient similar to that of silicon wafers, which can ensure the flatness and parallelism of silicon wafers.
Clamps: In the production process of silicon wafers, silicon carbide fixtures have the characteristics of heat resistance and non-destructiveness.
Coatings such as diamond-like carbon (DLC) can be applied to its surface to enhance performance, reduce chip damage, and prevent contamination from spreading.
Workpiece Table: Take the workpiece table in the lithography machine as an example. The workpiece table is mainly responsible for completing the exposure movement, requiring high-speed, large-stroke, and six-degree-of-freedom nano-level ultra-precision movement.
The silicon carbide workpiece table can meet these stringent requirements for motion accuracy and stability. For example, for a lithography machine with a resolution of 100nm, an overlay accuracy of 33nm, and a line width of 10nm, the workpiece table positioning accuracy is required to reach 10nm, the mask-silicon wafer simultaneous stepping and scanning speeds are 150nm/s and 120nm/s respectively, and the mask scanning speed is close to 500nm/s.
Guide rails, reflectors, ceramic chucks, arms: Silicon carbide ceramics are also widely used in guide rails, reflectors, ceramic chucks, arms and other components of key integrated circuit manufacturing equipment such as lithography machines.
These components require high precision, high stability and long life, and silicon carbide ceramics can meet these requirements, thereby improving the overall performance and reliability of the equipment.
2. Application fields and advantages of silicon carbide ceramics
Silicon carbide ceramics are widely used in the semiconductor industry, including but not limited to integrated circuit manufacturing, wafer processing, packaging and testing. Its advantages are mainly reflected in the following aspects:
High hardness: Silicon carbide ceramics have high hardness and can resist wear and scratches, thereby improving the service life and stability of the equipment.
High thermal conductivity: Silicon carbide ceramics have high thermal conductivity, can quickly dissipate heat, reduce the operating temperature of the equipment, and improve the performance and reliability of the equipment.
Low thermal expansion coefficient: Silicon carbide ceramics have a low thermal expansion coefficient and can maintain good thermal matching with silicon wafers, thereby improving processing accuracy and product quality.
Corrosion resistance: Silicon carbide ceramics have good corrosion resistance to a variety of chemical substances and can be used for a long time in harsh chemical environments without damage.
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