Alumina ceramic arm Semiconductor ceramic end effector 95%-99.99% alumina ceramic robotic arm

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Semiconductor ceramic

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Alumina ceramic arm Semiconductor ceramic end effector 95%-99.99% alumina ceramic robotic arm

Materials：Alumina (Al2O3)/ Zirconia(ZrO2) /Si3N4 /SiC ...etc
Sizes：Custom according to the drawings
Delivery times：2 -25 days(depends on the quantity)
Precision：Ra 0.1um tolerance: 0.001mm... etc
Features：Heat resistance / Wear resistance / High purity / Refractory / High Corrosion / Good Insulation
Customized：Can be custom for special sizes and shapes
1. Factory price and shipment within 24 hours In stocks
2. MOQ:1qty
3. Payment Term: PayPal; T/T; L/C etc.
4. Shipment: by sea by air by courier by post etc.

Free quotes notice:

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Alumina ceramic arms Semiconductor ceramic end effectors High purity 95%-99.99% alumina ceramic robotic arms

Alumina ceramic arms are important components in semiconductor equipment. They have the characteristics of high cleanliness, high stability, high precision, high efficiency and high reliability, and play a key role in the front-end process of semiconductor manufacturing.

Some ceramic arms and ceramic end effectors produced by Mingrui Ceramics

Performance advantages of semiconductor alumina ceramic arms:

Alumina ceramic arms are made of high-purity alumina (95%~99.99% Al2O3) and have the following excellent physical properties:

· High strength and high hardness: The bending strength of alumina ceramic sintered products can reach 250MPa, and the hot pressed products can reach 500MPa. The purer the alumina component, the higher the strength.

· High melting point: Alumina has a high melting point. When the semiconductor is heat treated, the alumina ceramic arm is less deformed by heat, which can reduce the deformation of semiconductor parts during heat treatment.

· Excellent chemical stability: Alumina ceramics have stable chemical properties and do not interact with many complex sulfides, phosphides, arsenides, chlorides, nitrides, bromides, iodides, oxides and sulfuric acid, hydrochloric acid, nitric acid and hydrofluoric acid. It will not leave contaminated fine particles and charged charges on the contacted items, will not produce metal ions, and will not pollute semiconductor parts.

· High resistivity and good electrical insulation performance: The room temperature resistivity is 1015Ω·cm and the insulation strength is 15kV/mm.

· Acid and alkali corrosion resistance: It has high resistance to NaOH erosion and does not interact with Si, P, Sb, and Bi in an inert atmosphere.

Advantages of semiconductor alumina ceramic arms:

1. Wear resistance and high temperature resistance: Excellent performance in vacuum, high temperature and corrosive gas environments, and long service life.

2. Anti-static, no damage to workpieces: no contamination or damage to wafers during wafer handling.

3. High precision and high reliability: able to meet the requirements of high-speed, clean wafer handling and processing in semiconductor manufacturing.

Delivery:
Custom OEM will be shipped within 15 days after determining the parameters
The samples will be shipped within 3 days
Quick Delivery Via Fedex,DHL,UPS,TNT Etc.
Support customer to designate shipping company
For more informations （the price,delivery time,moq etc）about the ceramic plates, please contact us or email:admin@cerampart.com

Ceramic materials(include but not limited belows)

· 95%--99.99% Alumina (Al2O3)

· Silicon Carbide (SiC)

· Silicon Nitride (Si3N4)

· MSZ: Magnesia partially stabilized Zirconia (ZrO2)

· YSZ: Yttria partially stabilized Zirconia (ZrO2)

· ZTA: 80% Al2O3+20% ZrO2...

	Al ₂O ₃	ZrO2/Y2O3	ZrO2/MgO	MgO	SiC	Si3N4 Reaction sintered	Si3N4 Hot pressed	ALN
Physical properties
Density (g/cm3)	3,9	5,9	5,75	3,58	3,2	3,27	3,29	3,26
Molecular weight (g/mole)	102	-	-	40,4	40,1	140	140	41
Maximum service temperature air (°C)	1700- 1800	1500	1000	2200	1500	1200- 1500	1100- 1600	1000- 1800
Mechanical properties
Hardness (Mohs)	9	-	-	5,5	9	-	-	7
Modulus of elasticity (GPa)	300-400	200	200	250-300	420	170-220	280-310	318
Poisson's ratio	0,25	-	-	0,18	0,14	0,25-0,26	0,27	0,25
Fracture toughness (MPa.m1/2)	2-3	7-13	6-10	-	2,5-3,5	3,5-5	6,1	4,5
Electrical properties
Dielectric constant	9-10	-	-	9-10	-	10	10	9,2
Electrical resistivity at 20°C (Ohm.cm)	>10 ₁₄	10 ₁₃-10 ₁₄	>10 ₁₀	-	10 ₂-10 ₆	>10 ₇	10 ₁₂- 10 ₁₅	>10 ₁₄
Dielectric strength (kV/mm)	10-20	9	2-10	-	-	-	-	15
Thermal properties
Specific heat (J/K/kg)	900	400-500	420	870-880	750	690	680-800	800
Thermal conductivity (W/m/K) at 20°C	26-35	2,2-3,2	1,5-2,5	40-50	63-155	9-30	15-43	180
Coefficient of thermal expansion ( 10-6) from 20 to 1000°C	8-9	10-11	5-16	10-13	4-5	3	3,3	4,4-5,3
Melting point (°C)	2050	2590	-	2800	2500	1900	1900	2200

Customization & Machining Service:
As a ceramic plates manufacturer,us offer a wide of the ceramic specification,and customized&machinables. Get a Quote On Your Customized Now!! or up a files by EMAIL.

Our Custom Capabilities:
1.High Purity Martoxid Powder
2.OEM Support, More Than 10 Technicians With 5-Year R&D Experience
3.35000 ㎡workshop, annual output could reach hundred million pieces.
4.All crafts are inspected strictly based on drawings,checked each month.
5.Best Service And Quick Delivery Via Fedex,DHL,UPS,TNT Etc.

Technical reference of manufacture
Dimensional accuracy	Up to 0.001mm
Concentricity	Up to 0.003mm
Parallelism	Up to 0.002mm
The inner hole tolerance	The minimum 0.005mm
Straight flute	The narrowest 0.1x100mm
The thickness of the size	Minimum to 0.02mm
The screw thread	Minimum internal thread M2
Cylindricity	Up to 0.004mm
The linear tolerance	Up to 0.001mm
The smallest aperture	The minimum 0.07mm
Precision process	CNC maching,grinding,lapping
Surface finish	Glazed,polishing or metallized

FAQ
1. Monthly Capacity: 50,000-60,000 pcs;
2. Material: OEM or as per your suggestion;
3. Lead time: about 7-20 days, pls confirm the quantities required;
4. Incoterm: FOB, CFR, CIF;
5. Delivery Cost: It is determinated by the destination port;
6. Payment Term: PayPal; T/T; L/C.
7. Shipment: by sea, by air, by courier, by post, etc.

Feedback
1. For any query or doubt, please contact us firstly, we will update with you soon;
2. For any other satisfaction, please also feedback to us, which could improve our service better and better.

For more information about ceramics parts,please contact our engineers in time >>>

some machining equipments of Mingrui Ceramic

Alumina ceramic arms Semiconductor ceramic end effectors High purity 95%-99.99% alumina ceramic robotic arms

Performance advantages of semiconductor alumina ceramic arms:

Advantages of semiconductor alumina ceramic arms:

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