Alumina ceramic end effectors 95%~99.99% Al2O3 semiconductor wafer handling end effectors
- Materials：Alumina (Al2O3)/ Zirconia(ZrO2) /Si3N4 /SiC ...etc
- Sizes：Custom according to the drawings
- Delivery times：2 -25 days(depends on the quantity)
- Precision：Ra 0.1um tolerance: 0.001mm... etc
- Features：Heat resistance / Wear resistance / High purity / Refractory / High Corrosion / Good Insulation
- Customized：Can be custom for special sizes and shapes
1. Factory price and shipment within 24 hours In stocks
2. MOQ:1qty
3. Payment Term: PayPal; T/T; L/C etc.
4. Shipment: by sea by air by courier by post etc.
Alumina ceramic end effectors 95%~99.99% Al2O3 semiconductor wafer handling end effectors
The ceramic end effector, also known as a ceramic manipulator, ceramic arm, etc., is the end part of the robot arm, which is mainly used to operate and move semiconductor wafers or other precision parts between different positions.
Characteristics of ceramic end effectors
1. High purity: Ceramic end effectors are usually made of ceramic materials such as high-purity alumina, which helps reduce the risk of contamination and ensure the quality and performance of the product.
2. Wear resistance: The wear resistance of ceramic materials enables them to maintain stable performance and extend their service life during frequent operations. Its wear resistance can even reach 266 times that of manganese steel.
3. High temperature resistance: Ceramic end effectors can work stably in high temperature environments, can withstand up to 1600℃, and have less thermal deformation, which is suitable for high temperature environments such as heat treatment in semiconductor processes.
4. Chemical corrosion resistance: In processes such as cleaning and etching, ceramic end effectors can resist corrosion from various chemical liquids and maintain stability.
5. Electrical insulation: Ceramic end effectors have excellent electrical insulation properties and are suitable for process environments that require current isolation to ensure the safety of semiconductor devices.
6. No pollution: Ceramic end effectors will not react with other substances, will not leave contaminated fine particles and charged charges on contacted items, and will not produce metal ions, thereby avoiding contamination of semiconductor parts.
Application of ceramic end effectors
1. Wafer handling: In the process of wafer manufacturing and testing, ceramic end effectors are used to grab, carry and place wafers, especially in high temperature or corrosive environments.
2. Chip Pick and Place: During the chip packaging process, ceramic end effectors are used to pick up chips from wafers and place them into substrates or packages.
3. Wire Bonding: During the wire bonding process of chip packaging, ceramic end effectors can be used to accurately place and fix wires to connect the chip to the external circuit.
4. Inspection and Sorting: During the inspection and sorting of semiconductor devices, ceramic end effectors can be used to transfer devices from one location to the inspection equipment.
5. Etching and Deposition Equipment: In the maintenance and operation of semiconductor equipment, ceramic end effectors can be used to handle and install parts in high temperature or corrosive environments.
6. Cleaning and Etching Processes: During wafer cleaning and etching processes, ceramic end effectors can operate in chemical liquid environments without being damaged.
Types of ceramic end effectors
Ceramic end effectors are mainly divided into various types such as clamping type, load-bearing type, vacuum adsorption type, etc., and the size can be customized according to specific needs.
Delivery:
Custom OEM will be shipped within 15 days after determining the parameters
The samples will be shipped within 3 days
Quick Delivery Via Fedex,DHL,UPS,TNT Etc.
Support customer to designate shipping company
For more informations （the price,delivery time,moq etc）about the ceramic plates, please contact us or email:admin@cerampart.com
Machining process
Raw materials-Molding process - Sintering - Machining & Grinding - Quality Inspector
Mingrui ceramic parts property
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· Flexural strength |
· Chemical resistance |
· Electrical insulation |
· Corrosion resistance |
· Dielectric strength |
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· Wear resistance |
· Temperature resistance |
· Thermal conductivity |
· High voltage |
· Hardness... |
Ceramic materials(include but not limited belows)
· 95%--99.99% Alumina (Al2O3) · Silicon Carbide · Silicon Nitride · TTZ: Magnesia partially stabilized Zirconia (ZrO2)
· YTZP: Yttria partially stabilized Zirconia (ZrO2) · ZDY: Yttria fully stabilized Zirconia (ZrO2)...
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Al 2O 3 |
ZrO2/Y2O3 |
ZrO2/MgO |
MgO |
SiC |
Si3N4 Reaction sintered |
Si3N4 Hot pressed |
ALN |
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Physical properties |
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Density (g/cm3) |
3,9 |
5,9 |
5,75 |
3,58 |
3,2 |
3,27 |
3,29 |
3,26 |
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Molecular weight (g/mole) |
102 |
- |
- |
40,4 |
40,1 |
140 |
140 |
41 |
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Maximum service temperature air (°C) |
1700- 1800 |
1500 |
1000 |
2200 |
1500 |
1200- 1500 |
1100- 1600 |
1000- 1800 |
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Mechanical properties |
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Hardness (Mohs) |
9 |
- |
- |
5,5 |
9 |
- |
- |
7 |
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Modulus of elasticity (GPa) |
300-400 |
200 |
200 |
250-300 |
420 |
170-220 |
280-310 |
318 |
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Poisson's ratio |
0,25 |
- |
- |
0,18 |
0,14 |
0,25-0,26 |
0,27 |
0,25 |
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Fracture toughness (MPa.m1/2) |
2-3 |
7-13 |
6-10 |
- |
2,5-3,5 |
3,5-5 |
6,1 |
4,5 |
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Electrical properties |
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Dielectric constant |
9-10 |
- |
- |
9-10 |
- |
10 |
10 |
9,2 |
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Electrical resistivity at 20°C (Ohm.cm) |
>10 14 |
10 13-10 14 |
>10 10 |
- |
10 2-10 6 |
>10 7 |
10 12- 10 15 |
>10 14 |
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Dielectric strength (kV/mm) |
10-20 |
9 |
2-10 |
- |
- |
- |
- |
15 |
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Thermal properties |
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Specific heat (J/K/kg) |
900 |
400-500 |
420 |
870-880 |
750 |
690 |
680-800 |
800 |
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Thermal conductivity (W/m/K) at 20°C |
26-35 |
2,2-3,2 |
1,5-2,5 |
40-50 |
63-155 |
9-30 |
15-43 |
180 |
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Coefficient of thermal expansion ( 10-6) from 20 to 1000°C |
8-9 |
10-11 |
5-16 |
10-13 |
4-5 |
3 |
3,3 |
4,4-5,3 |
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Melting point (°C) |
2050 |
2590 |
- |
2800 |
2500 |
1900 |
1900 |
2200 |
Customization & Machining Service:
As a ceramic parts manufacturer,us offer a wide of the ceramic specification,and customized&machinables. Get a Quote On Your Customized Now!! or up a files by EMAIL.
Our Custom Capabilities:
1.High Purity Martoxid Powder
2.OEM Support, More Than 10 Technicians With 5-Year R&D Experience
3.35000 ㎡workshop, annual output could reach hundred million pieces.
4.All crafts are inspected strictly based on drawings,checked each month.
5.Best Service And Quick Delivery Via Fedex,DHL,UPS,TNT Etc.
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Technical reference of manufacture |
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Dimensional accuracy |
Up to 0.001mm |
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Concentricity |
Up to 0.003mm |
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Parallelism |
Up to 0.002mm |
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The inner hole tolerance |
The minimum 0.005mm |
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Straight flute |
The narrowest 0.1x100mm |
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The thickness of the size |
Minimum to 0.02mm |
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The screw thread |
Minimum internal thread M2 |
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Cylindricity |
Up to 0.004mm |
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The linear tolerance |
Up to 0.001mm |
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The smallest aperture |
The minimum 0.07mm |
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Precision process |
CNC maching,grinding,lapping |
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Surface finish |
Glazed,polishing or metallized
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FAQ
1. Monthly Capacity: 50,000-60,000 pcs;
2. Material: OEM or as per your suggestion;
3. Lead time: about 7-20 days, pls confirm the quantities required;
4. Incoterm: FOB, CFR, CIF;
5. Delivery Cost: It is determinated by the destination port;
6. Payment Term: PayPal; T/T; L/C.
7. Shipment: by sea, by air, by courier, by post, etc.
Feedback
1. For any query or doubt, please contact us firstly, we will update with you soon;
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