Ceramic Tube / Ceramic Rod / Ceramic Plate / Ceramic Valve / Ceramic Plunger / Ceramic Pump Manufacturer
Focus on Alumina / Zirconia ceramic parts R&D and production
+86 -181 2297 4730
Ceramic Tube / Ceramic Rod / Ceramic Plate / Ceramic Valve / Ceramic Plunger / Ceramic Pump Manufacturer
Focus on Alumina / Zirconia ceramic parts R&D and production
+86 -181 2297 4730
Moble: +86 18122974730
Phone: +86 746 3386888
Email: admin@cerampart.comSkype: +86 18122974730Wechat: +86 18122974730
Semiconductor Ceramic Heater that provide a very high level of temperature uniformity across the semiconductor wafer to ensure consistent quality plus highly repeatable and efficient wafer processing.
Clamped-In Coil Heater
Provides excellent temperature uniformity at lower cost.
Hot Chuck Heater 300mm
A vacuum brazed-in 6061 T6 aluminum heater with a 2-3 Ra µin surface finish.
Vacuum Ring Heater
Provides uniform heat in vacuum chambers.
Vacuum Thermowell & Heater Assembly
Simultaneously Heat and Monitor Wafer Temperatures
Kapton Etched Foil Heater
Fast Responding, low profile, low outgassing.
Temperature uniformity +/- 1%
50°C - 450°C Temperature range
"Mirror" surface finish of 2-3 Ra µin
Hard coat Anodize
Custom available in a variety of shapes and sizes.
Stack heater technology prevents the need for brazing/casting.
High purity applications.
Precision control and uniformity through custom tile densities and patterns.
Distributed power, can realize the ideal application of heat, with the minimum loss for sub-processing.
Multiple heating zone functions for more precise control.
Almost any voltage, ac or dc voltage.
Integrated sensor, including thermocouple and RTD.
Wide range of lead configurations meet shock and vibration, vacuum and purity standards.
|
|
Al 2O 3 |
ZrO2/Y2O3 | ZrO2/MgO | MgO | SiC | Si3N4 Reaction sintered | Si3N4 Hot pressed | ALN |
| Physical properties | ||||||||
| Density (g/cm3) | 3,9 | 5,9 | 5,75 | 3,58 | 3,2 | 3,27 | 3,29 | 3,26 |
| Molecular weight (g/mole) | 102 | - | - | 40,4 | 40,1 | 140 | 140 | 41 |
| Maximum service temperature air (°C) | 1700- 1800 | 1500 | 1000 | 2200 | 1500 | 1200- 1500 | 1100- 1600 | 1000- 1800 |
| Mechanical properties | ||||||||
| Hardness (Mohs) | 9 | - | - | 5,5 | 9 | - | - | 7 |
| Modulus of elasticity (GPa) | 300-400 | 200 | 200 | 250-300 | 420 | 170-220 | 280-310 | 318 |
| Poisson's ratio | 0,25 | - | - | 0,18 | 0,14 | 0,25-0,26 | 0,27 | 0,25 |
| Fracture toughness (MPa.m1/2) | 2-3 | 7-13 | 6-10 | - | 2,5-3,5 | 3,5-5 | 6,1 | 4,5 |
| Electrical properties | ||||||||
| Dielectric constant | 9-10 | - | - | 9-10 | - | 10 | 10 | 9,2 |
| Electrical resistivity at 20°C (Ohm.cm) | >10 14 | 10 13-10 14 | >10 10 | - | 10 2-10 6 | >10 7 | 10 12- 10 15 | >10 14 |
| Dielectric strength (kV/mm) | 10-20 | 9 | 2-10 | - | - | - | - | 15 |
| Thermal properties | ||||||||
| Specific heat (J/K/kg) | 900 | 400-500 | 420 | 870-880 | 750 | 690 | 680-800 | 800 |
| Thermal conductivity (W/m/K) at 20°C | 26-35 | 2,2-3,2 | 1,5-2,5 | 40-50 | 63-155 | 9-30 | 15-43 | 180 |
| Coefficient of thermal expansion ( 10-6) from 20 to 1000°C | 8-9 | 10-11 | 5-16 | 10-13 | 4-5 | 3 | 3,3 | 4,4-5,3 |
| Melting point (°C) | 2050 | 2590 | - | 2800 | 2500 | 1900 | 1900 | 2200 |
|
Customization & Machining Service: As a ceramic plates manufacturer,us offer a wide of the ceramic specification,and customized&machinables. Get a Quote On Your Customized Now!! or up a files by EMAIL. Our Custom Capabilities: 1.High Purity Martoxid Powder 2.OEM Support, More Than 10 Technicians With 5-Year R&D Experience 3.35000 ㎡workshop, annual output could reach hundred million pieces. 4.All crafts are inspected strictly based on drawings,checked each month. 5.Best Service And Quick Delivery Via Fedex,DHL,UPS,TNT Etc. |
|
|||||||||||||||||||||||||||
FAQ
1. Monthly Capacity: 50,000-60,000 pcs;
2. Material: OEM or as per your suggestion;
3. Lead time: about 7-20 days, pls confirm the quantities required;
4. Incoterm: FOB, CFR, CIF;
5. Delivery Cost: It is determinated by the destination port;
6. Payment Term: PayPal; T/T; L/C.
7. Shipment: by sea, by air, by courier, by post, etc.
Feedback
1. For any query or doubt, please contact us firstly, we will update with you soon;
2. For any other satisfaction, please also feedback to us, which could improve our service better and better.
| For more information about ceramics parts,please contact our engineers in time >>> |
  |
Dynamic information Ceramic technology FAQ Ceramice exhibition
Ceramics quality Ceramics technical Ceramice after-sale Customer witness Patent certificate
Ceramic flange Ceramic bushing Ceramic plunger Ceramic pump valve
ADD：No. 21, Chuangxing Road, Shangsha Second Industrial Zone, Chang'an Town, Dongguan City
ADD：Southeast corner of the intersection of Changliu Road and Wangzhou Road, Qiyang High-tech Industrial Development Zone, Yongzhou City, Hunan Province, 426141,China
Mob：181 2297 4730 Tel：+86 746 3386888
Skype：+86 18122974730 Email：admin@cerampart.com
Mobile version
