E-mail:admin@cerampart.com

Ceramic Vacuum Chuck High Precision Semiconductor Ceramic Sucker Chuck

  • Materials:Alumina (Al2O3)/ Zirconia(ZrO2) /Si3N4 /SiC ...etc
  • Sizes:Custom according to the drawings
  • Delivery times:2 -25 days(depends on the quantity)
  • Precision:Ra 0.1um tolerance: 0.001mm... etc
  • Features:Heat resistance / Wear resistance / High purity / Refractory / High Corrosion / Good Insulation...

Ceramic Vacuum Chuck High Precision Semiconductor Ceramic Sucker Chuck

 
Ceramic Vacuum Chuck Widely used as the basic materials of various industrial products, such as filter, refractory, kiln furniture, absorbent, sound absorbent, lightweight structural materials, thermal insulation materials.
In particular, vacuum absorption technology with high precision and high performance is an ultra-thin object required for semiconductor, LED and display production.
 
 ceramic chucks

Some examples of custom chucks include

Round
Rectangular
Multi-zone
 

The Ceramic Vacuum Chuck can be made flat and parallel to 0.001 "across the surface.Customers only need to provide vacuum pump or internal vacuum with 1 "or -" NPT accessories.Alternatively, light machining provides a vacuum pump containing all the tubing and fittings required for operation (see below).
The units are less than 1.5″ in height, and are all “lightweight.”

 

Parts of us manufacturer common sizes

6″ Square vacuum surface with 20 micron pore
6″ Round vacuum surface with 20 micron pore
12″ vacuum surface with 20 micron pore
Drawing for the 6 inch square,  6 inch round, 12 inch square and 12 inch round.
 
 

Custom chuck dimensions are available

6″ < x < 12″: (square or rectagular)
x < 6″: (square or rectangular)
6″< x < 12″: (round)
< 6″: (round)


 

Delivery
Custom OEM will be shipped within 15 days after determining the parameters  
The samples will be shipped within 3 days
Quick Delivery Via Fedex,DHL,UPS,TNT Etc.
Support customer to designate shipping company

For more informations (the price,delivery time,moq etc)about the ceramic plates, please contact us or email:admin@cerampart.com

 
Ceramic materials(include but not limited belows)
· 95%--99.99% Alumina (Al2O3)   · Silicon Carbide   · Silicon Nitride  · TTZ: Magnesia partially stabilized Zirconia (ZrO2)
· YTZP: Yttria partially stabilized Zirconia (ZrO2)   · ZDY: Yttria fully stabilized Zirconia (ZrO2)...

 

Customization & Machining Service:
As a ceramic plates manufacturer,us offer a wide of the ceramic specification,and customized&machinables. Get a Quote On Your Customized Now!!  or up a files by EMAIL.

Our Custom Capabilities:
1.High Purity Martoxid Powder
2.OEM Support, More Than 10 Technicians With 5-Year R&D Experience
3.35000 ㎡workshop, annual output could reach hundred million pieces.
4.All crafts are inspected strictly based on drawings,checked each month.
5.Best Service And Quick Delivery Via Fedex,DHL,UPS,TNT Etc.

 
 
Technical reference of manufacture
Dimensional accuracy Up to 0.001mm
Concentricity Up to 0.003mm
Parallelism Up to 0.002mm
The inner hole tolerance The minimum  0.005mm
Straight flute The narrowest 0.1x100mm
The thickness of the size Minimum to 0.02mm
The screw thread Minimum internal thread M2
Cylindricity Up to 0.004mm
The linear tolerance Up to 0.001mm
The smallest aperture The minimum 0.07mm
Precision process CNC maching,grinding,lapping
Surface finish Glazed,polishing or metallized
 

 

FAQ
1. Monthly Capacity: 50,000-60,000 pcs;
2. Material: OEM or as per your suggestion;
3. Lead time: about 7-20 days, pls confirm the quantities required;
4. Incoterm: FOB, CFR, CIF;
5. Delivery Cost: It is determinated by the destination port;
6. Payment Term: PayPal; T/T; L/C.
7. Shipment: by sea, by air, by courier, by post, etc.
 
Feedback
1. For any query or doubt, please contact us firstly, we will update with you soon;
2. For any other satisfaction, please also feedback to us, which could improve our service better and better.

 

For more information about ceramics parts,please contact our engineers in time  >>> Ceramic Vacuum Chuck       Ceramic Vacuum Chuck

Ceramic Vacuum Chuck

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Dongguan Mingrui Ceramic Technology Co., Ltd.
TEL:+8618122974730
MB:+86 181 2297 4730 Tel:+86 746 3386888
Skype:+86 181 2297 4730
Email:admin@cerampart.com
ADD:No. 21, Chuangxing Road, Shangsha Second Industrial Zone, Chang'an Town, Dongguan City