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Semiconductor ceramic

Ceramic Chamber Rings For Semiconductor With Heat Stability Wear And Thermal Shock Resistance

  • Materials：Alumina (Al2O3)/ Zirconia(ZrO2) /Si3N4 /SiC ...etc
  • Sizes：Custom according to the drawings
  • Delivery times：2 -25 days(depends on the quantity)
  • Precision：Ra 0.1um tolerance: 0.001mm... etc
  • Features：Heat resistance / Wear resistance / High purity / Refractory / High Corrosion / Good Insulation...

Hotline

+86181-2297-4730

E-mail

admin@cerampart.com

Ceramic Chamber Rings For Semiconductor With Heat Stability Wear And Thermal Shock Resistance

 
OEM,custom high precision Semiconductor ceramic parts and components
 
Ceramic Chamber Rings for Semiconductor made from advance ceramics like Alumina (Al2O3),Silicon Carbide, Silicon Nitridem Zirconia (ZrO2)...has high thermal conductivity and hardness compared with other ceramic materials and excellent plasma resistance, oxidation resistance, wear resistance, corrosion resistance, heat stability, and thermal shock resistance. for semiconductor manufacturing equipment or parts.

Dimension of Ceramic Chamber Rings
·Inside Diameter as small as 0.3 mm
·Length as long as 400mm, as short as 0.5mm
·Inside Diameter tolerance we could make as fine as 0.002mm
·Outside Diameter tolerance as fine as 0.001mm 
·can be customized


Usage of Ceramic Chamber Rings

  • Members inside semiconductor chambers
    (perfect members for etchers and CVD devices)
  • Several types of members related to abrasion resistance
  • Electrostatic chucks

Delivery: 
Custom OEM will be shipped within 15 days after determining the parameters  
The samples will be shipped within 3 days
Quick Delivery Via Fedex,DHL,UPS,TNT Etc.
Support customer to designate shipping company
For more informations （the price,delivery time,moq etc）about the ceramic plates, please contact us or email:admin@cerampart.com

 
Ceramic materials(include but not limited belows)
· 95%--99.99% Alumina (Al2O3)   · Silicon Carbide   · Silicon Nitride  · TTZ: Magnesia partially stabilized Zirconia (ZrO2)
· YTZP: Yttria partially stabilized Zirconia (ZrO2)   · ZDY: Yttria fully stabilized Zirconia (ZrO2)...

 
Al 2O 3		 ZrO2/Y2O3 ZrO2/MgO MgO SiC Si3N4 Reaction sintered Si3N4 Hot pressed ALN
Physical properties                
Density (g/cm3) 3,9 5,9 5,75 3,58 3,2 3,27 3,29 3,26
Molecular weight (g/mole) 102 - - 40,4 40,1 140 140 41
Maximum service temperature air (°C) 1700- 1800 1500 1000 2200 1500 1200- 1500 1100- 1600 1000- 1800
Mechanical properties                
Hardness (Mohs) 9 - - 5,5 9 - - 7
Modulus of elasticity (GPa) 300-400 200 200 250-300 420 170-220 280-310 318
Poisson's ratio 0,25 - - 0,18 0,14 0,25-0,26 0,27 0,25
Fracture toughness (MPa.m1/2) 2-3 7-13 6-10 - 2,5-3,5 3,5-5 6,1 4,5
Electrical properties                
Dielectric constant 9-10 - - 9-10 - 10 10 9,2
Electrical resistivity at 20°C (Ohm.cm) >10 14 10 13-10 14 >10 10 - 10 2-10 6 >10 7 10 12- 10 15 >10 14
Dielectric strength (kV/mm) 10-20 9 2-10 - - - - 15
Thermal properties                
Specific heat (J/K/kg) 900 400-500 420 870-880 750 690 680-800 800
Thermal conductivity (W/m/K) at 20°C 26-35 2,2-3,2 1,5-2,5 40-50 63-155 9-30 15-43 180
Coefficient of thermal expansion ( 10-6) from 20 to 1000°C 8-9 10-11 5-16 10-13 4-5 3 3,3 4,4-5,3
Melting point (°C) 2050 2590 - 2800 2500 1900 1900 2200

 

Customization & Machining Service:
As a ceramic plates manufacturer,us offer a wide of the ceramic specification,and customized&machinables. Get a Quote On Your Customized Now!!  or up a files by EMAIL.

Our Custom Capabilities:
1.High Purity Martoxid Powder
2.OEM Support, More Than 10 Technicians With 5-Year R&D Experience
3.35000 ㎡workshop, annual output could reach hundred million pieces.
4.All crafts are inspected strictly based on drawings,checked each month.
5.Best Service And Quick Delivery Via Fedex,DHL,UPS,TNT Etc.
 		  
Technical reference of manufacture
Dimensional accuracy Up to 0.001mm
Concentricity Up to 0.003mm
Parallelism Up to 0.002mm
The inner hole tolerance The minimum  0.005mm
Straight flute The narrowest 0.1x100mm
The thickness of the size Minimum to 0.02mm
The screw thread Minimum internal thread M2
Cylindricity Up to 0.004mm
The linear tolerance Up to 0.001mm
The smallest aperture The minimum 0.07mm
Precision process CNC maching,grinding,lapping
Surface finish Glazed,polishing or metallized
 

 

FAQ
1. Monthly Capacity: 50,000-60,000 pcs;
2. Material: OEM or as per your suggestion;
3. Lead time: about 7-20 days, pls confirm the quantities required;
4. Incoterm: FOB, CFR, CIF;
5. Delivery Cost: It is determinated by the destination port;
6. Payment Term: PayPal; T/T; L/C.
7. Shipment: by sea, by air, by courier, by post, etc.
 
Feedback
1. For any query or doubt, please contact us firstly, we will update with you soon;
2. For any other satisfaction, please also feedback to us, which could improve our service better and better.
 

For more information about ceramics parts,please contact our engineers in time  >>>       
 

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Dongguan Mingrui Ceramic Technology Co., Ltd.
TEL：+8618122974730
MB：+86 181 2297 4730 Tel：+86 746 3386888
Skype：+86 181 2297 4730
Email：admin@cerampart.com
ADD：No. 21, Chuangxing Road, Shangsha Second Industrial Zone, Chang'an Town, Dongguan City