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Ceramic E Chucks High Durability Flatness Surface Roughness Semiconductor Ceramic Chucks
- Materials：Alumina (Al2O3)/ Zirconia(ZrO2) /Si3N4 /SiC ...etc
- Sizes：Custom according to the drawings
- Delivery times：2 -25 days(depends on the quantity)
- Precision：Ra 0.1um tolerance: 0.001mm... etc
- Features：Heat resistance / Wear resistance / High purity / Refractory / High Corrosion / Good Insulation
Ceramic Electro-Static Chucks High Durability Flatness Surface Roughness Semiconductor Ceramic Chucks
OEM,custom high precision Semiconductor ceramic parts and components
Ceramic Electro-Static Chucks (e-Chucks) as a the core semiconductor devices and It has been widely used in plasma-based and vacuum-based semiconductor processing. The ceramic electrostatic chuck has technical advantages on non-edge exclusion, high reliability, wafer planarity, and particles reduction for adsorbing and cooling/heating wafers.
Product data (reference value)
・Chucking/De-chucking response time: < 3 seconds
・Chucking Force: 706 N (φ 300 mm, 0.75% pin surface)
・The data indicated herein is representative values and not guaranteed values.
Dimension of Semiconductor Ceramic Electro-Static Chucks
Us support to custom the sizes of chuck.
Advantages of Semiconductor Ceramic Electro-Static Chucks :
1. Refractory, High Temperature Resistance, Maximum Used Temperature: 1800 ºC (3272ºF)...
2. Hardness Strength, Wear Resistance Up To Mohz 9.0; HRA 80-90...
3. High Voltage, Good Insulation Performance ,Electrical Resistivity Up To 10∧14 Ohm.Cm...
4. High Polished Surface Up To Rz0.8(Ra0.1) ...
5. Superior Mechanical Strength, Max 10 MPa.m1/2 Fracture toughness,
6. Pressure Resistance, Max 2300MPa compressive strength...
7. Anti-High Corrosion Resistance, Such As Acid Alkali Resistance...
8. Long Service Life...
9. Other excellent property
Delivery:
Custom OEM will be shipped within 15 days after determining the parameters
The samples will be shipped within 3 days
Quick Delivery Via Fedex,DHL,UPS,TNT Etc.
Support customer to designate shipping company
For more informations （the price,delivery time,moq etc）about the ceramic plates, please contact us or email:admin@cerampart.com
Custom OEM will be shipped within 15 days after determining the parameters
The samples will be shipped within 3 days
Quick Delivery Via Fedex,DHL,UPS,TNT Etc.
Support customer to designate shipping company
For more informations （the price,delivery time,moq etc）about the ceramic plates, please contact us or email:admin@cerampart.com
Ceramic materials(include but not limited belows)
· 95%--99.99% Alumina (Al2O3) · Silicon Carbide · Silicon Nitride · TTZ: Magnesia partially stabilized Zirconia (ZrO2)
· YTZP: Yttria partially stabilized Zirconia (ZrO2) · ZDY: Yttria fully stabilized Zirconia (ZrO2)...
· 95%--99.99% Alumina (Al2O3) · Silicon Carbide · Silicon Nitride · TTZ: Magnesia partially stabilized Zirconia (ZrO2)
· YTZP: Yttria partially stabilized Zirconia (ZrO2) · ZDY: Yttria fully stabilized Zirconia (ZrO2)...
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Al 2O 3 |
ZrO2/Y2O3 | ZrO2/MgO | MgO | SiC | Si3N4 Reaction sintered | Si3N4 Hot pressed | ALN |
| Physical properties | ||||||||
| Density (g/cm3) | 3,9 | 5,9 | 5,75 | 3,58 | 3,2 | 3,27 | 3,29 | 3,26 |
| Molecular weight (g/mole) | 102 | - | - | 40,4 | 40,1 | 140 | 140 | 41 |
| Maximum service temperature air (°C) | 1700- 1800 | 1500 | 1000 | 2200 | 1500 | 1200- 1500 | 1100- 1600 | 1000- 1800 |
| Mechanical properties | ||||||||
| Hardness (Mohs) | 9 | - | - | 5,5 | 9 | - | - | 7 |
| Modulus of elasticity (GPa) | 300-400 | 200 | 200 | 250-300 | 420 | 170-220 | 280-310 | 318 |
| Poisson's ratio | 0,25 | - | - | 0,18 | 0,14 | 0,25-0,26 | 0,27 | 0,25 |
| Fracture toughness (MPa.m1/2) | 2-3 | 7-13 | 6-10 | - | 2,5-3,5 | 3,5-5 | 6,1 | 4,5 |
| Electrical properties | ||||||||
| Dielectric constant | 9-10 | - | - | 9-10 | - | 10 | 10 | 9,2 |
| Electrical resistivity at 20°C (Ohm.cm) | >10 14 | 10 13-10 14 | >10 10 | - | 10 2-10 6 | >10 7 | 10 12- 10 15 | >10 14 |
| Dielectric strength (kV/mm) | 10-20 | 9 | 2-10 | - | - | - | - | 15 |
| Thermal properties | ||||||||
| Specific heat (J/K/kg) | 900 | 400-500 | 420 | 870-880 | 750 | 690 | 680-800 | 800 |
| Thermal conductivity (W/m/K) at 20°C | 26-35 | 2,2-3,2 | 1,5-2,5 | 40-50 | 63-155 | 9-30 | 15-43 | 180 |
| Coefficient of thermal expansion ( 10-6) from 20 to 1000°C | 8-9 | 10-11 | 5-16 | 10-13 | 4-5 | 3 | 3,3 | 4,4-5,3 |
| Melting point (°C) | 2050 | 2590 | - | 2800 | 2500 | 1900 | 1900 | 2200 |
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Customization & Machining Service: As a ceramic plates manufacturer,us offer a wide of the ceramic specification,and customized&machinables. Get a Quote On Your Customized Now!! or up a files by EMAIL. Our Custom Capabilities: 1.High Purity Martoxid Powder 2.OEM Support, More Than 10 Technicians With 5-Year R&D Experience 3.35000 ㎡workshop, annual output could reach hundred million pieces. 4.All crafts are inspected strictly based on drawings,checked each month. 5.Best Service And Quick Delivery Via Fedex,DHL,UPS,TNT Etc. |
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FAQ
1. Monthly Capacity: 50,000-60,000 pcs;
2. Material: OEM or as per your suggestion;
3. Lead time: about 7-20 days, pls confirm the quantities required;
4. Incoterm: FOB, CFR, CIF;
5. Delivery Cost: It is determinated by the destination port;
6. Payment Term: PayPal; T/T; L/C.
7. Shipment: by sea, by air, by courier, by post, etc.
Feedback
1. For any query or doubt, please contact us firstly, we will update with you soon;
2. For any other satisfaction, please also feedback to us, which could improve our service better and better.
| For more information about ceramics parts,please contact our engineers in time >>> |
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Dongguan Mingrui Ceramic Technology Co., Ltd.
TEL：+8618122974730
MB：+86 181 2297 4730 Tel：+86 746 3386888
Skype：+86 181 2297 4730
Email：admin@cerampart.com
ADD：No. 21, Chuangxing Road, Shangsha Second Industrial Zone, Chang'an Town, Dongguan City
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